Time Domain Resolution of Nanopositioning Systems

Note: a method for estimating the resolution of nanopositioning systems.

This Note describes a new technique for estimating the resolution of nanopositioning systems. By recording the voltage applied to an actuator and performing a filtering operation, the position noise and resolution can be estimated. This technique is simple to apply in practice and does not require any additional sensors or specialized equipment.

Preloading Piezoelectric Stack Actuators in High-Speed Nanopositioning Systems

Recent development in high-speed nanotechnology applications, such as scanning probe microscopy and nanofabrication, has increased interest on the advancement of high-bandwidth flexure-guided nanopositioning systems. These systems are capable of providing motions with sub-nanometer resolution over a positioning bandwidth of a few kilohertz or more. High-speed nanopositioning devices are commonl...

Nanopositioning for storage applications

In nanotechnology applications, nanopositioning, i.e., nanometer-scale precision control at dimensions of less than 100 nm, plays a central role. One can view nanopositioners as precision mechatronics systems aiming at moving objects over a certain distance with a resolution that could be as low as a fraction of an Ångström. Actuation, position sensing and feedback control are the key component...

Performance Specifications of Nanopositioning Systems : Accuracy , Precision , and Resolution

Invited review article: high-speed flexure-guided nanopositioning: mechanical design and control issues.

Recent interest in high-speed scanning probe microscopy for high-throughput applications including video-rate atomic force microscopy and probe-based nanofabrication has sparked attention on the development of high-bandwidth flexure-guided nanopositioning systems (nanopositioners). Such nanopositioners are designed to move samples with sub-nanometer resolution with positioning bandwidth in the ...